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CNC Machining of a Quartz Exhaust Tray for Semiconductor Wafer Processing

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Quartz Exhaust Tray
Quartz Exhaust Tray

A new customer in the semiconductor industry had been having difficulty finding a fabricator willing to tackle the challenge of manufacturing the exhaust tray shown here, until they contacted us at Pacific Quartz, Inc. As specialists in machining complex forms from high-purity materials, we were uniquely capable of transforming their drawing into a high quality, functional component for their gallium nitride wafer processing application.

The technical skills of our machining staff, combined with our investment in state-of-the-art equipment, enabled us to meet the challenge of creating the intricate geometry of the workpiece. We fabricated the tray from premium quality fused quartz and Blanchard ground it to a smooth 32 micro inch finish. The completed part featured overall dimensions of 32" in length x 7" in width x 1.7" in height, and CMM inspection validated that we met the ±0.008" tolerance requirement.

This new customer was very pleased with the form, fit, and functionality of this product and relieved to finally have found a vendor that could satisfy their requirements. If you are interested in learning more about this project or the processes we used to produce it, contact us today.

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Quartz Exhaust Tray Project Highlights

Project Name
Quartz Exhaust Tray
Project Description
Quartz exhaust tray for gallium nitride semiconductor substrates processing.
Capabilities Applied/Processes
Primary:
CNC Machining
Blanchard Grinding
Equipment Used to Manufacture Part
Saw, Blanchard, CNC, CMM
Overall Part Dimensions
32" x 7" x 1.7"
Tightest Tolerances
+/- 0.008"
Material Used
Fused Quartz Traceable to Lot Melt
Material Finish
32 Micro Inch
In Process Testing/Inspection Performed
CMM
Industry for Use
Semiconductor Wafer Processing
Delivery/Turnaround Time
8 Weeks
Delivery Location
FOB Origin
Standards Met
All Custom Drawing Specifications

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